PSCC Subheading 8486.90 — Parts and accessories

Of apparatus for rapid heating of semiconductor wafers

Of spin dryers for semiconductor wafer processing

Of machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers

Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools

Other

Of grinding, polishing and lapping machines for processing of semiconductor wafers

Of apparatus for growing or pulling monocrystal semiconductor boules

Other

Of chemical vapour deposition apparatus for semiconductor production

Of epitaxial deposition machines for semiconductor wafers; of spinners for coating photographic emulsions on semiconductor wafers

Of ion implanters for doping semiconductor materials; of apparatus for physical deposition by sputtering on semiconductor wafers; of physical deposition apparatus for semiconductor production; of direct write-on-wafer apparatus, step and repeat aligners and other lithography equipment

Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools

Other

Tool holders and self-opening dieheads; workholders; dividing heads and other special attachments for machine-tools

Other

Of resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers; of inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers

Other

Of apparatus for dry etching patterns on flat panel display substrates

Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools

Other

Of chemical vapour deposition apparatus for flat panel display production

Of spinners for coating photosensitive emulsions on flat panel display substrates

Of apparatus for physical deposition on flat panel display substrates

Other

Of focused ion beam milling machines to produce or repair masks and reticles for patterns on semiconductor devices

Of die attach apparatus, tape automated bonders, wire bonders and of encapsulation equipment for assembly of semiconductors

Of automated machines for the transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other materials for semiconductor devices

Of optical stereoscopic and photomicrographic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles

Of electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles

Of pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates, including printed circuit assemblies

Other

Machines and apparatus for the manufacture of boules or wafers

Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits

Machines and apparatus for the manufacture of flat panel displays

Machines and apparatus specified in Note 11 (C) to this Chapter